« Publikationen
Deep trench etching in macroporous silicon - application to photonic crystal gas sensors
Wehrspohn, Ralf B. ; Schweizer, Stefan ; Geppert, Torsten ; Lambrecht, Armin
State-of-the-art program on compound semiconductors 48 (SOTAPOCS 48) and ZnO, InZnO, and InGaO related materials and devices for electronic and photonic applications. - Pennington, NJ : Electrochemical Soc., S. 61-67, 2008
Bibliographie: Konferenz/Aufsatz
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